RF Atom Source : NL-ATS
The RF Atom source produces a beam of neutral atoms of hydrogen, oxygen or nitrogen which are more reactive than molecular gases. The all-metal source construction is ideally suited to meet the rigorous needs of MBE for the growth of oxides and nitrides and High Tc superconductors, high bandgap semiconductors and doping of III-V materials.
The NL-ATS Atom source series is designed to meet rigorous UHV standards for not only MBE-type systems, but also for high quality sputtering or for PLD systems. The instrument has all-metal vacuum seals and is fully bakeable to 250°C. Water cooling of the RF coil and the tip of the source minimises the thermal impact of the source during its operation. The plasma discharge tube is constructed from high purity ceramic materials which vary, depending on the nature of the gas used for source operation and can be easily swapped out by the user to switch between gases. The compact NL-ATS30 variant is supplied on a CF63 flange and fits on most commercial MBE, ALD and sputter systems. The high power 30mm atomic beam is ideally suited for R&D use. The larger NL-ATS60 variant provides a larger atomic beam diameter of 50mm for production and pilot line systems. Plasma emission monitoring enables the operator to interrogate the molecular and atomic species produced by the source.
Key Features
- Ion Free atom source.
- For use with Oxygen, Nitrogen, Hydrogen or Argon gases.
- All metal construction is UHV compatible.
- Bakeable up to 250°C.
- Ideal for epitaxial growth of nitrides and oxides.
- Atomic gas delivery system for PLD and sputtering.
- Fitted with alumina, PBN or quartz discharge tubes to suit the atomic species.
- Plasma Emission Monitoring capability.
- Wide range of aperture plate configurations available.
Specifications
| Options | NL-ATS30 | NL-ATS60 |
| Mounting flange | NW63CF (4.5” O.D) | NW100CF (6” O.D.) |
| UHV compatible | Yes, bakeable up to 250°C | |
| In vacuum length | Customizable (275mm as standard) | |
| In-vacuum diameter | 60mm | 96mm |
| Beam diameter | 30mm | 50mm |
| Gas Compatibility and discharge tube/aperture plate material | O2 Quartz, Alumina N2 PBN, Quartz H2 Quartz, PBN, Alumina Ar Quartz | |
| Aperture plate design | 0.2, 0.3 and 0.5mm diameter holes as standard 5, 9, 37 holes as standard (other diameters and number of holes on request) | |
| Gas Flow | 0.1-10Sccm for O2 and N2 dependent on aperture plate design | |
| RF Power | 50-400W | 50-600W |
| RF Tuning | Automatic | |
| Shutter | Manual or Automated | |
| Cooling | Min Water flow 0.5l/min | |
| Optical plasma monitoring | Optional | |
| Ion beam deflection plates | Optional | |
| Power Supply Specification (Optional) | ||
| Cable Length | 5m as standard – customizable | |
| RF Power Supply | 13.56MHz, 600W (35Amps @ 4.5KV peak) Automatic matching network including controller Forward power metering: +/-1% full scale, +/-1% reading Output power stability: +/0.5% long term, +/-1% Watt Single phase, 100-240VAC, 50/60Hz | |
| DC Power supply (deflection plates) | Up to 500V, up to 1mA Single phase, 100-240VAC, 50/60Hz | |