Thermal Gas Cracker : TGC

Ion free atomic oxygen or hydrogen source 

Our Thermal Gas Cracker enables the thermal dissociation of molecular gases, such as Hydrogen and Oxygen, using e-beam heating of a fine bore inert cracker tube via an oxygen resistant filament. The highly efficient catalytic nature of the instrument enables a low operating temperature, achieving significant gas dissociation (>70%). By contrast, rival Tungsten filament cracker designs are incompatible with reactive gases, use a higher temperature, and do not induce a high dissociation.

 The source is UHV compatible. Water cooling ensures minimal outgassing, while the low gas flow and power requirements mean a very small heat load is added to the vacuum chamber.

The TGC can be supplied individually or integrated with any Nikalyte custom-built PVD system

Key Features

  • Ion free atomic species
  • >70% gas dissociation
  • Operatable with pressure below 5×10-4 torr
  • Low power operation

Thermal Gas Cracker Specifications

Mounting flangeNW40CF (2.75″ O.D.)
UHV compatibleYes, bakeable to 250degC
In vacuum lengthStandard 300mm (bespoke length available)
In-vacuum diameter32mm
Maximum cracking power75W (typical 30W to 40W)
Gas flow0 – 1sccm (typical 0.5sccm)
Gas regulationBy MFC or leak valve (optional)
Cracking efficiencyUp to 90% (hydrogen)
Up to 60% (oxygen)
CapillaryW (hydrogen)
Ir (oxygen)
Beam divergenceApprox. 15° half angle
FilamentW-Filament (2 mounted, 1 spare)
CoolingMinimum water flow of 0.5 l/min
Cable length5m
Power supplySingle phase, 100-240VAC, 50/60Hz
ShutterIntegral manual or motorised shutter (optional)

 

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