Hybrid MBE Source

Nikalyte’s Hybrid MBE source is a highly customisable injector for metal organics, which allows the controlled integration of gas phase metallic precursors with conventional effusion cell growth of complex oxides and rare earth titanates for quantum technologies. 

The Hybrid MBE source is a heated gas injector system which uses an automated pressure regulated feedback loop to deliver a controlled flux of metal ions to the ultra-high vacuum environment of an MBE chamber. The injector is suitable for metal organic precursors, such as Titanium Tetraisopropoxide (TTIP) or Vanadium Oxytriisopropoxide (VTIP) for Molecular beam growth of superconducting materials, such as strontium titanate. Independent temperature control of both the bubbler and the gas manifold ensures there are no cold spots and that a stable pressure/flow is achieved prior to growth. The Hybrid MBE source has multiple purge points to allow the source tank to be replenished or exchanged for a different metal organic without the need to vent the MBE system. The Hybrid MBE source can be provided with or without the injector and customized injector designs are available. The all-metal source construction is ideally suited to meet the rigorous needs of MBE for the growth of High Tc superconductors, high bandgap semiconductors, magnetics and doping of III-V materials.