Mini e-beam source for thin film evaporation
The Evap-4 is a highly efficient, compact 4 pocket mini e-beam evaporator featuring co-evaporation capability. Mini E-beam evaporators allow the deposition of common process metals such as Gold, Silver and Chrome with exceptional control and minimal heat load on substrate and surroundings when compared with a thermal boat source. The electron beam directly heats the crucible which contains the evaporant to produce a partially collimated beam of metal vapour.
The Evap-4 is fully UHV compatible and can be supplied individually or integrated with any Nikalyte custom-built PVD system.
Key Features
- Co-evaporation of up to 4 materials
- Compact source design
- Low thermal load on substrates
- Combined 4-channel power supply
- Flux measurement for rate monitoring
- Fully UHV compatible
- Bakeable up to 250°C
- Includes a choice between manual or pneumatically controlled shutter
- Customizable in-vacuum length
Evap-4 Specifications
| Mounting flange | NWCF63 |
| In vacuum length | Standard 300mm (bespoke length available) |
| In-vacuum diameter | 57mm |
| Crucible volume | 1000mm3 (1CC) |
| Crucible Materials | Mo, W, Gr |
| Crucible Liner | Al203, PBN |
| UHV compatible | Yes, bakeable to 250degC |
| Coolant flow | Minimum 1.0 l/min |
| Power | single phase 100-240VAC, 50/60Hz |
| Shutter | Integral manual or optional pneumatically operated |