Cylindrical Sputter Chamber on Frame
The refurbished Cylindrical Sputter Chamber on Frame is built for high vacuum advanced sputtering applications.
Stainless Steel Cylindrical Sputter Chamber complete with three sputter source fitted with pneumatically actuated shutters on an easy-to-move frame.
Key Features
- Stainless steel cylindrical chamber with 350mm ID, mounted on a frame with wheels
- Frame dimensions: 500mm x 830mm
- NW350CF Torus Cluster Flange with three 3-inch sputter sources, featuring pneumatically actuated swing shutters
- Magnetrons fitted with standard magnets for non-magnetic target sputtering
- Condition: Never been used
Port Specifications
| Port Size | Total number of ports |
| CF350 | 2 |
| CF200 | 1 rotable |
| CF150 | 3 (2 rotable, 1 fixed) |
| CF63 | 2 (1 rotable, 1 fixed) |
| CF35 | 10 |