Mantis Deposition NanoSys Vacuum System
The refurbished Mantis Deposition NanoSys chamber offer a flexible PVD system complete with Pfeiffer pump, vacuum guagues and 14 spare ports.
Designed for advanced thin-film and nanoparticle deposition, the refurbished Mantis Deposition NanoSys features high vacuum performance, durable stainless steel construction, and versatility with multiple instrument ports.
Key Features
- Stainless Steel Chamber: 450mm OD on mobile frame with wheels.
- Cooling Manifold: Frame-mounted with flow meter for efficient cooling.
- CF100 Viewport: With shutter for added safety.
- CF200 Hinged Door: Easy access and secure.
- 14 Instrument Ports: Available for future upgrades.
- Pfeiffer 700HiPace Turbo Pump: 51,950 hours runtime with adjustable baffle.
- Agilent SH110 Dry Scroll Pump: 51,481.1 hours runtime with new seals.
- Inficon BPG400 Gauge: Full-range gauge with VGC402 readout.
- Inficon Quartz Crystal Sensor: For precise deposition control.
- Condition: Used
Port Specifications
| Port Size | Total number of ports | Number already allocated | Ports available |
| CF200 | 1 | 1 – confocal facing down | |
| CF150 | 5 | 1 – for Turbo | 1 – confocal facing up 2 – horizontal facing centre of chamber |
| CF100 | 4 | 1 – for Viewport | 3 – confocal facing up |
| CF40 | 8 | 1 – for QCM | 4 – confocal facing up 1 – confocal facing down 2 – horizontal facing centre of chamber |